Semiconductor and Electronics Industry Cleanroom Solutions

Unique Requirements and Standards​

• Extreme cleanliness demands: Dominated by ISO 5-7 grades (Class 100-10,000), with advanced packaging areas requiring ISO 4 (Class 10) to control particles ≥0.1μm.​

• Multidimensional control: Simultaneously manage temperature (20-24℃±0.1℃), humidity (40-50%±2%), vibration (≤50μm/s), and static electricity (≤100V).​

• International standards: Must comply with SEMI S2, ISO 14644, and GMP for electronics, with strict process isolation requirements between different production stages.​

Core Solutions​

Air Purification System​

• Filtration hierarchy: Pre-filter (G4) + medium-efficiency filter (F9) + sub-high efficiency filter (H13) + terminal ULPA filter (99.999% efficiency for ≥0.12μm particles).​

• Airflow design: Full coverage unidirectional flow (0.45m/s±20%) in core areas, with air change rates up to 500 times/hour.​

• Pressure control: Gradient pressure difference (≥5Pa between adjacent zones) to prevent cross-contamination.​

Contamination Control Measures​

• Material management: Airlocks for incoming materials, dedicated unpacking and cleaning procedures, and ultra-pure water (18.2MΩ·cm) with TOC ≤10ppb.​

• Surface treatment: Welded stainless steel walls (304/316L), seamless PVC floors, and silicone-free sealants.​

• Chemical control: Local exhaust systems for etching processes, with acid gas removal efficiency ≥99%.​

Lean Operation Strategies​

• Intelligent monitoring: Real-time particle counters, temperature/humidity sensors, and IoT-based centralized control systems.​

• Energy optimization: Heat recovery units (energy saving ≥30%), variable frequency fans, and LED cleanroom lighting.​

• Maintenance protocols: Quarterly HEPA/ULPA filter integrity testing, monthly airflow velocity verification, and annual comprehensive performance validation.​

Future Trends​

• Miniaturization: Development towards ISO 3 (Class 1) cleanrooms to adapt to 3nm and smaller process nodes.​

• Green innovation: Adoption of low-VOC materials and renewable energy integration.​

• Digital transformation: AI-driven predictive maintenance and digital twins for virtual commissioning.​

Semiconductor cleanrooms require a balance of extreme cleanliness, process stability, and operational efficiency. By integrating advanced filtration technology, precise environmental control, and intelligent management systems, these critical facilities support the production of high-performance electronic components.